Development of Auger Electron Diffraction for Surface Crystalline Structure Determination

Chak Ming Liu^1*, Shang-Hsien Hsieh¹, Chia-Hao Chen¹

¹National Synchrotron Radiation Research Center, Hsinchu, Taiwan

* Presenter:Chak Ming Liu, email:liu.edward@nsrrc.org.tw

To determine the surface crystalline structure of monolayer van der Waals (vdW) materials is always a challenge. In order to solve such problem, we are developing Auger electron diffractions (AED) for studying the surface atomic structure. As is well known, Auger electron spectroscopy is a surface sensitive technique carrying chemical information, by coupling with the diffraction capability of specific Auger electron peak, the surface atomic structure with elemental distribution can be achieved. In this study, we use the MoS₂ single crystal as test sample to perform a preliminary study for the development of AED technique. The experimental system and the data analysis procedure will be discussed in detail in the presentation.

Keywords: surface crystalline structure, Auger electron diffractions, MoS2